Cardinal UHP Stainless Steel Tubing: Tailored Solutions for Semiconductor and Critical Gas Applications
Cardinal offers premium-grade stainless steel tubing solutions for industries requiring the highest purity and safety standards, particularly in semiconductor manufacturing and other critical gas applications. Our specialized tubing options Electropolished (EP) Coiled Tubing and Cleaned for Oxygen Service (CFOS) Coiled Tubing address distinct operational needs for delivering ultra-high purity gases and reactive gases like oxygen.
Electropolished (EP) Coiled Tubing: Maximum Purity and System Integrity
Cardinal’s Electropolished (EP) Coiled Tubing is engineered for processes where the absolute purity of the gas is crucial, such as in semiconductor manufacturing processes like etching, chemical vapor deposition (CVD), ion implantation, and lithography. Our EP coiled tubing undergoes a proprietary electropolishing process in a single continuous draw, ensuring a uniform, ultra-smooth internal surface. This electropolished finish eliminates micro-imperfections that could trap contaminants or moisture, which are potential threats to ultra-high purity (UHP) gas delivery.
Key Advantages of EP Coiled Tubing:
- Reduced Contamination Risk: The electropolished surface minimizes the risk of particle generation and adsorption of impurities, ensuring consistent gas purity.
- Improved Corrosion Resistance: Electropolishing removes surface irregularities, reducing corrosion risks, especially in high-purity gas applications.
- Coiled Design Benefits: Continuous coiled tubing reduces the number of welds or connections needed, significantly lowering the risk of leaks and enhancing system reliability. This also results in faster installation, lower labor costs, and long-term operational efficiency.
EP coiled tubing is increasingly the preferred choice not only in semiconductors but also in refining, petrochemical, offshore, and power generation industries, where purity, system integrity, and ease of installation are paramount.
Cleaned for Oxygen Service (CFOS) Coiled Tubing: Ensuring Safety with Reactive Gases
Cardinal’s Cleaned for Oxygen Service (CFOS) Coiled Tubing is specifically designed for transporting reactive gases, like oxygen, which require stringent cleanliness standards to prevent hazardous reactions. Oxygen, in particular, poses a significant risk of ignition or explosion when it comes into contact with contaminants, making cleanliness critical. Our CFOS tubing undergoes rigorous cleaning and validation procedures to meet industry standards for oxygen service, ensuring the internal surfaces are free from hydrocarbons, moisture, and particulate contamination.
Key Advantages of CFOS Tubing:
- Rigorous Cleaning Processes: Our CFOS tubing is cleaned and validated to ensure it is free from any residues that could react dangerously with oxygen or other reactive gases.
- High-Safety Standards: Meets and exceeds industry-specific safety regulations and standards for oxygen service in industries such as pharmaceuticals, aerospace, medical gases, and refining.
- Enhanced Durability: CFOS tubing is manufactured to maintain high integrity under pressure, ensuring long-lasting performance in high-demand applications.
TECH 10CR (COIL)
Low Ra non-electropolished welded and seamless 316L SS tubing and fittings. Used for analyzer sample lines, O2 piping (CFOS), medical gas distribution and vent lines.
- Average surface roughness of 25µin and 32µin Ra maximum.
- Controlled sulfur for consistent weldability.
- Cleaned to ASTM G93-96 Level A.
- Exceeds CFOS CGA G4.1 cleaning.
- Fully passivated with nitric acid.
- Rinsed with DI water, purged with filtered nitrogen, capped and double bagged in heat sealed polyethylene.
- Final cleaning and bagging in ISO Class 7 cleanroom.
TECH 50CR (COIL)
Electropolished welded and seamless 316L SS tubing and fittings. Used for ultra-high purity gas distribution systems.
- Electropolished to average 7µin Ra and 10µin Ra maximum
- Controlled sulfur for consistent weldability.
- Low particulate cleaning.
- Cleaned to ASTM G93-96 Level A.
- Exceeds CFOS CGA G4.1 cleaning.
- Fully passivated with nitric acid.
- Rinsed with 60°C DI water, purged with filtered UHP nitrogen, capped and double bagged in heat sealed polyethylene.
- Final cleaning and bagging in ISO Class 7 cleanroom.
- Helium leak, particle count, SEM and XPS batch testing with Certificate of Conformity.
